Tank Farm Department  [ Return towards  Services  ]

The project team also manages all tank farm tender, design, construction and commissioning. Bulk Gas and ESG Systems are sited within the Gas Tank Farm. The Gas Tank Farm is the hub that supplies utilities and ultra-high purity gases to the wafer fabrication customer without interruption. The quality of the gas is monitored continuously by on-site Gas Monitoring Systems.

Our on-site gas tank farm facility is tailored to the customer's total gas requirements. Its design incorporates SOXAL value-added engineering expertise including:

On-site gas generators and other bulk systems

On-site bulk ESG systems are designed and built to provide gases at economic scale. QRA studies are conducted for flammable, corrosive and toxic gases.

Bulk gas storages and secondary backup equipment

The liquid storage tanks act as a secondary source of supply. Liquid is vaporized and supplied as gaseous product during maintenance or plant shut-down. This provides continuous gas supply to the customer without interruption. Backup equipments like vaporizer, compressor, pallets, trailers, purifiers, electrical generators, etc are used to enhance gas supply reliability.

Purifiers and filtering systems

Bulk Gas Purifiers

3 basic configurations of purifiers are used in the gas pad:

• Process gas purifier (argon and helium)
• Process gas purifier (hydrogen)
• Process gas purifier (nitrogen)

Features of Gas Purifiers 

• Fully automatic operation using microprocessor-based controls
• Accurate process management with all closed loop feedback control
• Maximum uptime and safety through multi-tired fault response
• Code compliance to CE, ASME, TUV and NFPA  

Bulk Gas Filter Skid

Bulk gas is filtered using bulk gas filtered skid, which consists of redundancy filters. The particle retention is within log six to log nine and 0.003 micron. Particle counter is used to monitor particle in the gas stream.

Continuous monitoring system

• Complete automated-DCS/PLC based monitoring system
• Continuous quality control of process gases and bulk supply system
• Both typical and advanced analytical instrument-APIX is used for sub-ppb measurement.